德国 Gao-Liang Dai教授讲座通知
受学校国际合作与交流基金资助，应我校电气学院超精密光电仪器工程研究所谭久彬教授邀请，德国联邦物理研究院（PTB） Gao-Liang Dai教授将于2014年8月15日在我校进行短期访问讲学。讲座报告内容、时间和地点如下，欢迎全校师生参加：
报告题目：Accurate and traceable nano dimensional metrology for nanomanufacturing
Current position: Gaoliang Dai is currently a principal research scientist and the head of the working group “AFM CD Metrology” at the Physikalisch-Technische Bundesanstalt (PTB) – the national metrology institute of Germany. He is a board member of the International Committee on Measurements and Instrumentation (ICMI), and an editorial board member of several scientific journals.
Education: Gaoliang Dai gained a BSc, an MSc and a Dr.-Ing. in optical engineering from the Tsinghua University in the year 1994, 1998 and 1998, respectively.
Professional history: Gaoliang Dai was a R&D engineer in the Physik Instrument (PI) GmbH & Co till the year 2001. He was the head of the working group “Photomask metrology” at PTB till the year 2013. He has authored over 80 technical publications. His main areas of research have been the measurements of nano- and microscale structures by means of stylus profilometer, optical and atomic force microscopes (AFM). He has improved the world first metrological AFM – Veritekt, developed the world first metrological large range AFM, and developed a new 3D/CD-AFM for critical dimensional metrology. His research results offer versatile nano dimensional calibration capabilities for supporting nanoscience and nanomanufacturing. The performance of his research lies at the word top level.